Bibcode
Gocalinska, A.; Manganaro, M.; Pelucchi, E.
Bibliographical reference
Applied Physics Letters, Volume 100, Issue 15, id. 152112 (5 pages) (2012).
Advertised on:
4
2012
Journal
Citations
9
Refereed citations
8
Description
A virtual substrate for high quality InAs epitaxial layer has been
attained via metalorganic vapor-phase epitaxy growth of Sb-assisted
InxGa1-xAs metamorphic buffers, following a convex
compositional continuous gradient of the In content from x = 53% to
100%. The use of trimethylantimony (or its decomposition products) as a
surfactant has been found to crucially enable the control over the
defect formation during the relaxation process. Moreover, an
investigation of the wafer offcut-dependence of the defect formation and
surface morphology has enabled the achievement of a reliably uniform
growth on crystals with offcut towards the [111]B direction.