Bibcode
Gocalinska, A.; Manganaro, M.; Pelucchi, E.
Bibliographical reference
AIP Conference Proceedings, Volume 1566, Issue 1, p.17-18
Advertised on:
12
2013
Journal
Citations
0
Refereed citations
0
Description
We present a virtual substrate for high quality InAs epitaxial layer,
obtained via metalorganic vapor-phase epitaxy growth of Sb-assisted
InxGa1-xAs metamorphic buffers, following a convex
compositional continuous gradient of the In content from x = 53 % to 100
%. The use of Trimethylantimony (or its decomposition products) as a
surfactant was found to be a suitable way to control defect formation
during the relaxation process. Reliably uniform growth with good
morphology was obtained on crystals with misorientation toward [111]B
direction.